产品系列

Fluidix®蒸汽动力去离子水(DI)热水系统

Fluidix®蒸汽动力去离子水(DI)热水系统

由Heateflex提供的Fluidix®蒸汽动力去离子水(DI)加热系统,为半导体行业提供了一个低成本的替代方案,可以使用电力来加热大量的去离子化水。

Fluidix®加热系统于2021年4月2日停产。取而代之的是 Aquarius®去离子水加热系统。)

  • l  Ultra-pure design with PVDF/PFA wetted surfaces

  • l  Low cost of ownership because it utilizes steam, which costs less compared to an electrical heater

  • l  PLC with touch-screen controls

  • l  PLC with mixing valve temperature control for +/- 0.5º C provides precise temperature control

  • l  Reliable technology with over 30 years of proven operation in the field — over 400 million gallons of heated DI water

Heater

Steam-powered Deionized (DI) water heater system

Wetted Surfaces

PVDF/PFA

Sizes

500,000-3,000,000 Btu/hr, or approximately 200 kW- 800 kW

Temperature

Ambient to 95º C

Temperature Accuracy

+/- 0.5º C (contingent on customer's facilitation)

Flow

0.5 GPM (1.9 LPM) to 100 GPM (378 LPM)

Pressure

Steam Side, 15 psi;  Process Side, 68 psi